About the Journal :
Conductive and highly transparent indium tin ox- ide (ITO) thin films were prepared on photosensitive glass substrates by the combination of sol–gel and spin-coating techniques. First, the substrates were coated withamorphous Sn-doped indium hydroxide, and these amorphous films were then calcined at 550◦C to produce crystalline andelectricallyconductiveITOlayers.Theresultingthin films were characterized by means of scanning electronmicroscopy, UV-Vis spectroscopy, X-ray photoelectron spectroscopyandspectroscopicellipsometry.Themeasurements revealedthattheITOfilmswerecomposedofsphericalcrystallitesaround20nminsizewithmainlycubiccrystalstructure. The ITO films acted as antireflection coatingsincreasing the transparency of the coated substrates compared to that of the bare supports. The developed ITO films with a thickness of 170–330 nm was highly transparent in the visible spectrum with sheet resistances of 4.0–13.7 kQ/sq. By coating photosensitive glass with ITO films, our results openupnewperspectivesinmicro-andnano-technology, for example in fabricating conductive and highly transparent 3D microreactors.
Keywords:Analysis; Characterization; ITO; Nanostructure.